Description
2. Applications
- Semiconductor Manufacturing: As shown in the above case, it is used for pressure monitoring in various semiconductor manufacturing processes, such as CVD, physical vapor deposition (PVD), and etching. It helps to maintain the precise pressure conditions required for high – quality semiconductor production.
- Pharmaceutical Industry: In pharmaceutical manufacturing, the TK – PRS021 can be used to monitor the pressure in cleanrooms, autoclaves, and other equipment. It ensures the proper functioning of these devices and helps to maintain a sterile and controlled environment for drug production.
- Food and Beverage Industry: For food processing plants, it can be used to monitor the pressure in filling machines, pasteurizers, and other equipment. It helps to ensure the safety and quality of food products by maintaining the correct pressure during processing.
3. Weight and Dimensions
- Weight: The TK – PRS021 weighs approximately 0.6 kg. This relatively light weight makes it easy to install and handle, especially when mounting it on equipment in confined spaces.
- Dimensions: It has dimensions of about 100 mm in length, 70 mm in width, and 30 mm in height. These compact dimensions allow it to be easily integrated into existing equipment and control systems without taking up much space.
4. Features
- High – Precision Pressure Measurement: The TK – PRS021 offers high – precision pressure measurement, with an accuracy of up to ±0.1% of the full – scale range. This allows for the detection of even small pressure changes, which is crucial in applications where precise pressure control is required.
- Wide Pressure Range: It can measure pressures in a wide range, from vacuum to high – pressure applications. This flexibility makes it suitable for a variety of industrial processes with different pressure requirements.
- Digital Output: It provides a digital output signal, which can be easily interfaced with other devices such as programmable logic controllers (PLCs), data loggers, and control systems. This simplifies the integration of the pressure sensor into the overall control system.
5. Stability and Reliability
- Robust Design: The TK – PRS021 is built with a durable housing that provides protection against dust, moisture, and mechanical vibrations. This makes it suitable for use in harsh industrial environments, such as semiconductor cleanrooms and pharmaceutical manufacturing facilities.
- Long – Term Stability: It has excellent long – term stability, with minimal drift over time. This ensures that the pressure measurements remain accurate and reliable over an extended period, reducing the need for frequent calibration.
- High – Quality Components: It uses high – quality sensing elements and electronic components, which undergo strict quality testing during the manufacturing process. This helps to ensure the overall reliability of the device.
6. Parameter Specifications
- Power Supply: It operates on a 24V DC power supply, with an allowable voltage range of 21.6V to 26.4V. This wide voltage range ensures stable operation even in the presence of small power fluctuations.
- Pressure Range: The standard pressure range is from 0 to 10 bar, but it can be customized to other ranges according to specific application requirements.
- Output Signal: It provides a digital output signal in the form of Modbus RTU over RS – 485. This allows for easy communication with other devices in the control network.
- Response Time: The response time is typically less than 100 ms, enabling it to quickly detect and respond to pressure changes.
- Operating Temperature Range: It can operate in a temperature range of – 20°C to + 60°C, which is suitable for most industrial applications.
1. Real – world Case
In a semiconductor manufacturing cleanroom, the TK – PRS021 was used for precise pressure monitoring in a chemical vapor deposition (CVD) chamber. The CVD process is critical for depositing thin films on semiconductor wafers, and maintaining the correct pressure inside the chamber is essential for the quality and uniformity of the deposited films.
One day, during a production run, the TK – PRS021 detected a slight but abnormal drop in pressure within the CVD chamber. The device immediately sent an alarm signal to the control system. The operators were alerted and quickly investigated the issue.
Using the detailed pressure data provided by the TK – PRS021, they discovered that a small leak had occurred in the gas supply line. Thanks to the early detection by the TK – PRS021, the operators were able to stop the process, repair the leak, and resume production with minimal impact on the product quality and production schedule. This incident demonstrated the importance of the TK – PRS021 in ensuring the stable and high – quality operation of the semiconductor manufacturing process.
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